Atomic Layer Deposition of Two-Dimensional Layered Materials: Processes, Growth Mechanisms, and Characteristics

Polaritons in layered two-dimensional materials.

In recent years, enhanced light-matter interactions through a plethora of dipole-type polaritonic excitations have been observed in two-dimensional (2D) layered materials. In graphene, electrically tunable and highly confined plasmon-polaritons were predicted and observed, opening up opportunities for optoelectronics, bio-sensing and other mid-infrared applications. In hexagonal boron nitride, ...

Reaction Path Analysis for Atomic Layer Deposition Processes

In this paper, we examine the mathematical structure of thin-film deposition process reaction kinetics models with the goal of determining whether a reaction network can guarantee the self-limiting and stable growth inherent in true atomic layer deposition systems. This analysis is based on identifying reaction invariants and interpreting the chemical significance of these conserved modes. A sp...

Atomic Defects in Two Dimensional Materials.

Atomic defects in crystalline structures have pronounced affects on their bulk properties. Aberration-corrected transmission electron microscopy has proved to be a powerful characterization tool for understanding the bonding structure of defects in materials. In this article, recent results on the characterization of defect structures in two dimensional materials are discussed. The dynamic beha...

Atomic Layer Deposition of TiO

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The integration of high-k dielectric on two-dimensional crystals by atomic layer deposition